| Step | Action | 
| 1 | Select “Simulation 3D Using 64bit Simulator…” under the Simulation menu, 3D Simulation Parameters dialog box appears. | 
| 2 | Click advanced button to check the boundary condition setting. | 
| 3 | Click Spectrum button to check the spectral information setting. | 
| 4 | Unselect Use Non uniform Mesh checkbox in the Nonuniform Mesh Parameters region. Click OK button to close the simulation parameters dialog box. | 
| 5 | Repeat step 1 to open the 3D Simulation Parameters dialog box again. The current setting is for uniform mesh simulation, the mesh size is 0.005 μm . Under the mesh setting region, read the minimum memory requirement is: 175.75M bytes | 
| 6 | Select Use Nonuniform Mesh checkbox in the Nonuniform Mesh Parameters region. Click OK button to close the simulation parameters dialog box. | 
| 7 | Open the 3D Simulation Parameters dialog box. The current setting uses the non-uniform mesh. Read the memory usage is 54.28M bytes. | 
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