Electrode design for SoI rib waveguide
I have created and tested the SoI rib waveguide and now I need to include the electrodes to control the waveguide. How to design electrodes for rib waveguide. In technical papers, it is mentioned that we need to add p+ and n+ doping regions of type Silicon in the slab silicon.
My doubts are:
1. How to generate these p+ and n+ regions? How to include the doping concentrations in these regions?
2. How to incorporate these doped regions in the SoI rib waveguide to electronically control the waveguide?
Your reply may be helpful for my work.
Thanks in advance..
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